Dr. Hua Li
at Tsinghua Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 4, 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Microelectromechanical systems, Lithium, Aerospace engineering, Sensors, Nickel, Silicon, Humidity, Finite element methods, Standards development, Synchrotron technology

PROCEEDINGS ARTICLE | January 4, 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Microelectromechanical systems, Polymethylmethacrylate, Metals, Error analysis, Nickel, Photoresist materials, Precision measurement, Mask making, Tolerancing, Assembly tolerances

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