Dr. Hua Rong Profile

Dr. Hua Rong

at Nanjing Normal Univ

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Author

Publications (7)

SPIE Journal Paper | 5 February 2015 Open Access

In situ measurement of MEMS topography based on phase-shifting interferometry

Xi Chen, Hua Rong

OE, Vol. 54, Issue 02, 024103, (February 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.2.024103

KEYWORDS: Phase shifts, Microelectromechanical systems, Phase interferometry, In situ metrology, Ferroelectric materials, Algorithm development, Optical engineering, Reconstruction algorithms, Transducers, Interferometry

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Proceedings Article | 2 June 2014 Paper

Optical fiber Fabry-Perot pressure sensor based on SU-8

Jiali Zhu, Lihua Dai, Ming Wang, Dongyan Cai, Hua Rong, Sheng Jia, Jingjing You

Proceedings Volume 9157, 915791 (2014) https://doi.org/10.1117/12.2058514

KEYWORDS: Sensors, Silicon, Optical fibers, Fabry–Perot interferometers, Photoresist materials, Semiconducting wafers, Microopto electromechanical systems, Lithography, Fiber optics sensors, Demodulation

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Proceedings Article | 9 January 2008 Paper

Study on in-situ measuring method for average stress gradient of a MEMS film

Hua Rong, Ming Wang

Proceedings Volume 6800, 680020 (2008) https://doi.org/10.1117/12.759463

KEYWORDS: Microelectromechanical systems, Electrodes, Manufacturing, Optoelectronics, Roads, Crystals, Microelectronics, Photonics, Nanotechnology, Holographic optical elements

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Proceedings Article | 4 January 2008 Paper

A novel optical MEMS pressure sensor with a mesa diaphragm

Yixian Ge, Ming Wang, Hua Rong, Xuxing Chen

Proceedings Volume 6836, 68360R (2008) https://doi.org/10.1117/12.755190

KEYWORDS: Sensors, Microelectromechanical systems, Microopto electromechanical systems, Visibility, Optical fibers, Systems modeling, Silicon, Fiber optics sensors, Fabry–Perot interferometers, Optical sensing

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Proceedings Article | 5 March 2007 Paper

The design and fabrication of an optical fiber MEMS pressure sensor

Yixian Ge, Ming Wang, Hua Rong, Xuxing Chen

Proceedings Volume 6595, 659541 (2007) https://doi.org/10.1117/12.726498

KEYWORDS: Sensors, Silicon, Glasses, Microelectromechanical systems, Semiconducting wafers, Etching, Optical fibers, Fabrication, Aluminum, Fabry–Perot interferometers

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Proceedings Article | 30 December 2004 Paper

Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm

Ming Li, Ming Wang, Tinting Wang, Hua Rong, Xuxing Chen

Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.573685

KEYWORDS: Sensors, Microopto electromechanical systems, Reflectivity, Fabry–Perot interferometers, Error analysis, Microelectromechanical systems, Silicon, Finite element methods, Optical fibers, Signal attenuation

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Proceedings Article | 10 September 2002 Paper

Equivalent circuit macromodel for a beam-structure electromechanical system in F-I analogy

Hua Rong, Qing-An Huang, Weihua Li

Proceedings Volume 4928, (2002) https://doi.org/10.1117/12.483182

KEYWORDS: Microelectromechanical systems, Electromechanical design, Signal detection, Signal processing, Modal analysis, Capacitance, Device simulation, Optical simulations, Electrodes, Microsystems

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Showing 5 of 7 publications

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