Dr. Hua Rong
at Nanjing Normal Univ
SPIE Involvement:
Author
Publications (7)

SPIE Journal Paper | February 5, 2015
OE Vol. 54 Issue 02
KEYWORDS: Phase shifts, Microelectromechanical systems, Phase interferometry, In situ metrology, Ferroelectric materials, Algorithm development, Optical engineering, Reconstruction algorithms, Transducers, Interferometry

PROCEEDINGS ARTICLE | June 2, 2014
Proc. SPIE. 9157, 23rd International Conference on Optical Fibre Sensors
KEYWORDS: Optical fibers, Lithography, Fabry–Perot interferometers, Sensors, Silicon, Demodulation, Fiber optics sensors, Photoresist materials, Microopto electromechanical systems, Semiconducting wafers

PROCEEDINGS ARTICLE | January 9, 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Microelectromechanical systems, Nanotechnology, Holographic optical elements, Roads, Electrodes, Crystals, Manufacturing, Optoelectronics, Photonics, Microelectronics

PROCEEDINGS ARTICLE | January 4, 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Microelectromechanical systems, Optical fibers, Fabry–Perot interferometers, Optical sensing, Sensors, Silicon, Fiber optics sensors, Microopto electromechanical systems, Systems modeling, Visibility

PROCEEDINGS ARTICLE | March 5, 2007
Proc. SPIE. 6595, Fundamental Problems of Optoelectronics and Microelectronics III
KEYWORDS: Fabrication, Microelectromechanical systems, Optical fibers, Fabry–Perot interferometers, Sensors, Etching, Glasses, Silicon, Aluminum, Semiconducting wafers

PROCEEDINGS ARTICLE | December 30, 2004
Proc. SPIE. 5641, MEMS/MOEMS Technologies and Applications II
KEYWORDS: Microelectromechanical systems, Optical fibers, Fabry–Perot interferometers, Sensors, Signal attenuation, Error analysis, Silicon, Reflectivity, Microopto electromechanical systems, Finite element methods

Showing 5 of 7 publications
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