Dr. Hua Song
Dir, R&D at Synopsys Inc
SPIE Involvement:
Publications (23)

Proceedings Article | 13 June 2022 Presentation
Folarin Latinwo, Yulu Chen, Cheng-En Wu, Peter Brooker, Hyesook Hong, Delian Yang, Hua Song, Kevin Lucas
Proceedings Volume 12052, 120520P (2022) https://doi.org/10.1117/12.2615990
KEYWORDS: Printing, Data modeling, Data processing, Semiconductors, Semiconducting wafers, Process control, Photoresist materials, Photoresist developing, Optical lithography, Metrology

Proceedings Article | 22 February 2021 Presentation
Proceedings Volume 11614, 116140R (2021) https://doi.org/10.1117/12.2584940
KEYWORDS: Optical proximity correction, Machine learning, Data modeling, Manufacturing, Critical dimension metrology, Semiconductors, Photomasks, Semiconducting wafers, Optical lithography, Neural networks

Proceedings Article | 21 March 2019 Presentation + Paper
Folarin Latinwo, Delian Yang, Cheng-En (Rich) Wu, Peter Brooker, Yulu Chen, Hua Song, Kevin Lucas
Proceedings Volume 10961, 109610G (2019) https://doi.org/10.1117/12.2516344
KEYWORDS: Data modeling, Calibration, 3D modeling, Photoresist developing, Photoresist materials, Lithography, Optical lithography

Proceedings Article | 8 October 2018 Presentation + Paper
Rich Wu, Delian Yang, Folarin Latinwo, Kevin Lucas, Hua Song
Proceedings Volume 10810, 108101A (2018) https://doi.org/10.1117/12.2501992
KEYWORDS: 3D modeling, Photoresist processing, Optical proximity correction, Photoresist materials, Photomasks, Optical lithography, Photoresist developing, Semiconducting wafers, Lithography, Data modeling

Proceedings Article | 18 March 2015 Paper
Cheng-En Wu, Wayne Yang, Lan Luan, Hua Song
Proceedings Volume 9426, 94261Q (2015) https://doi.org/10.1117/12.2086048
KEYWORDS: Etching, Ions, Plasma, Data modeling, Plasma etching, Anisotropy, Reflection, Critical dimension metrology, 3D modeling, Monte Carlo methods

Showing 5 of 23 publications
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