Dr. Hua Song
Sr RD Manager at Synopsys Inc
SPIE Involvement:
Author
Publications (21)

Proceedings Article | 21 March 2019
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Data modeling, Calibration, 3D modeling, Photoresist developing, Photoresist materials, Lithography, Optical lithography

Proceedings Article | 8 October 2018
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: 3D modeling, Photoresist processing, Optical proximity correction, Photoresist materials, Photomasks, Optical lithography, Photoresist developing, Semiconducting wafers, Lithography, Data modeling

Proceedings Article | 18 March 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Etching, Ions, Plasma, Data modeling, Plasma etching, Anisotropy, Reflection, Critical dimension metrology, 3D modeling, Monte Carlo methods

Proceedings Article | 18 March 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Data modeling, Optical proximity correction, Photoresist developing, Photoresist materials, Critical dimension metrology, Photoresist processing, Lithography, Semiconducting wafers, Physics, Reverse modeling

Proceedings Article | 31 March 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: 3D modeling, Diffusion, Calibration, Data modeling, Lithography, Photoresist processing, Optical proximity correction, Etching, Lithographic illumination, Semiconducting wafers

Showing 5 of 21 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top