During optical coatings monitoring, the test glass edgy-effect often makes the monitoring curve falseness and thin films
thickness control inaccurate. The thin films edge-effect makes the films thickness different from the test glass centre to
the edge, and the edge-effect gets distinctly with coating layers increasing. NBBF (narrow band pass filter) is fabricated,
and its monitoring curve and spectrum curve are analyzed. The results show that the edge-effect comes from material
deposition angle when test glass does not rotate, temperature and electric field different distributing on the test glass
surface. Several methods are used to minish the test glass edge-effect, such as, rotating the test glass to reduce the films
thickness difference caused by material deposition angle, using quartz and other glass alike material as a link between
test glass and the fixture to lessen temperature and electric field different distributing, making beam size small monitor
the test glass centre field, where can be considered having no thickness different. The above methods make the thickness
symmetrical over the test glass, and then the experiment monitoring curve is close to the theory curve. The results are
important for the thin films automatic monitoring, especially for NBBF coatings.
ITO films have been grown by ion beam-assisted deposition (IBAD) using 90In-10Sn (wt%) alloy. The electrical and
optical properties of these films have been investigated as a function of oxygen flux, evaporation rate, ion energy and
substrate temperature during deposition. The films with resistivity as low as cm Ω 2.4 × 10<sup>-3</sup> Ω • <i>cm</i> (at room temperature) and 8 × 10<sup>-4</sup> Ω • <i>cm</i> (at 150°C) have been deposited, and the transmittance of all samples in the visible range is above 82%.
The deposited films at room temperature are polycrystalline with a preferred orientation of (222) and the size of crystal
particle is about 21nm, and the surface roughness for the ITO films grown at room temperature is Ra=5.32nm.
Crown gear couplings are usually used in metallurgy and steel rolling equipments, which is manufactured by duplicating processing in common. The method makes the manipulator work hard, and the efficiency is low. The machining precision is limited to the shape of the mold and it is difficult to control the movement of machines table. This work stated an NC system to use hobbing machine. It consists of an industrial control computer, grating sensor, servo- motor and its driver source, servo driver card and other I/O equipments of inputting and outputting. The grating sensor was installed in the axial direction to trace the instantaneous position of gob rest. The radial movement of the machine table was controlled by a servomotor. When the computer captures the axial signal, this system controls the machine table by moving ahead or backwards according to the calculated value of interpolation theory. Thus, two dimensions (axial and radial) associated movement was realized while the crown gear was processed. The feature of the system is that a grating sensor used in the axial direction replaces the servomotor. By making a little change in the mechanism of the machine, NC can be implement and its redesign cost is very low. The design software has an interpolation function for a circular arc and line. The system has been used on a Y1380 gear hobbing machine, and the correlative software of machining crown gear has been designed as well. Satisfactory results have been obtained, showing facility and reliability in practical operation.