Proc. SPIE. 8916, Sixth International Symposium on Precision Mechanical Measurements
KEYWORDS: Atomic force microscopy, Edge detection, Charge-coupled devices, Control systems, Calibration, 3D metrology, Quartz, Detection and tracking algorithms, Atomic force microscope, Optical resolution
Atomic force microscope (AFM) with dual probes that operate together can measure both side walls excellently at the same time, which virtually eliminates the prevalent effect of probe width that contributes a large component of uncertainty in measurement results and finally obtains the critical dimension (CD)(e.g. the linewidth) through data synthesis. In calibration process, the dual probes must contact each other in advance, which realizes the alignment in the three dimensions, to establish a zero reference point and ensure the accuracy of measurement. Because nowadays the optical resolution of advanced lens have exceeded micrometer range, and the size of probes is within micro level, it is possible to acquire dual probes images in both horizontal and vertical directions, through which the movement of the probes can be controlled in time. In order to further enhance the alignment precision, sub-pixel edge detection method based on Zernike orthogonal moment is used to obtain relative position between these two probes, which helps the tips alignment attains sub-micron range. Piezoelectric nanopositioning stages calibrated by laser interferometer are used to implement fine movement of the probes to verify the accuracy of the experimental results. To simplify the system, novel self-sensing and self-actuating probe based on a quartz tuning fork combined with a micromachined cantilever is used for dynamic mode AFM. In this case, an external optical detection system is not needed, so the system is simple and small.
Atomic force microscope is one of indispensable measurement tools in nano/micronano precision manufacture and critical dimension measurement. To expand its industry application, a novel head and system are newly designed combined with Nanosensors cooperation’s patented probe — Akiyama probe, which is a self-sensing probe. The modal analysis and resonance frequency are obtained by finite element(FE) simulations. Using the Locked-in amplifier, the effective and available signal can be abtained. Through the experiment analysis, the retracting and extending curve reflects the tip and sample interaction. Furthermore, the measurement on the calibrated position system demonstrates that the whole system resolution can reach the nanometer scale.