Hua-kun Zhang
at Heifei university of technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 10 October 2013
Proc. SPIE. 8916, Sixth International Symposium on Precision Mechanical Measurements
KEYWORDS: Atomic force microscopy, Edge detection, Charge-coupled devices, Control systems, Calibration, 3D metrology, Quartz, Detection and tracking algorithms, Atomic force microscope, Optical resolution

Proceedings Article | 10 October 2013
Proc. SPIE. 8916, Sixth International Symposium on Precision Mechanical Measurements
KEYWORDS: Finite element methods, Sensors, Atomic force microscope, Feedback signals, Capacitance, Atomic force microscopy, Signal analysis, Calibration, Electrodes, Amplifiers

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