Huan Ting Tseng
at United Microelectronics Corp
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | April 6, 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Etching, Image processing, Scanning electron microscopy, Line width roughness, Immersion lithography, Optical proximity correction, Line edge roughness, Photoresist processing, Semiconducting wafers

PROCEEDINGS ARTICLE | March 14, 2006
Proc. SPIE. 6156, Design and Process Integration for Microelectronic Manufacturing IV
KEYWORDS: Lithography, Data modeling, Calibration, Manufacturing, Inspection, Finite element methods, Photomasks, Photoresist processing, Semiconducting wafers, Process modeling

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Optical design, Metrology, Metals, Image processing, Tungsten, Manufacturing, Optical alignment, Semiconducting wafers, Overlay metrology, Chemical mechanical planarization

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