Huan Hu
at Univ of Illinois
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 29, 2013
Proc. SPIE. 8725, Micro- and Nanotechnology Sensors, Systems, and Applications V
KEYWORDS: Gold, Nanostructures, Etching, Polymers, Silicon, Aluminum, Wet etching, Nanoelectromechanical systems, Nanofabrication, Nanolithography

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