Dr. Huatan Qiu
Barrier Technology Manager at
SPIE Involvement:
Author
Area of Expertise:
Plasma , Semiconductor , Process , Design , Engineering
Publications (11)

SPIE Journal Paper | July 1, 2008
JM3 Vol. 7 Issue 03
KEYWORDS: Gold, Reflectivity, Molybdenum, Ions, Extreme ultraviolet, Mirrors, Plasma, Xenon, Extreme ultraviolet lithography, Photodiodes

SPIE Journal Paper | April 1, 2007
JM3 Vol. 6 Issue 02
KEYWORDS: Plasma, Lithium, Mirrors, EUV optics, Extreme ultraviolet, Extreme ultraviolet lithography, Ions, Sputter deposition, Reflectivity, Optics manufacturing

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Gold, Mirrors, Sputter deposition, Ions, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Molybdenum, Ruthenium, Plasma

PROCEEDINGS ARTICLE | January 18, 2007
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Gold, Mirrors, Contamination, Sputter deposition, Ions, Silicon, Extreme ultraviolet lithography, Molybdenum, Ruthenium, Tin

PROCEEDINGS ARTICLE | January 18, 2007
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Mirrors, Lithium, Sputter deposition, Ions, Surface roughness, Atomic force microscopy, Extreme ultraviolet, Optics manufacturing, EUV optics, Plasma

SPIE Journal Paper | January 1, 2007
JM3 Vol. 6 Issue 01
KEYWORDS: Ions, Molybdenum, Mirrors, Gold, Silicon, Extreme ultraviolet, Ruthenium, Extreme ultraviolet lithography, Multilayers, Sputter deposition

Showing 5 of 11 publications
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