Dr. Huatan Qiu
Barrier Technology Manager
SPIE Involvement:
Author
Area of Expertise:
Plasma , Semiconductor , Process , Design , Engineering
Publications (11)

SPIE Journal Paper | 1 July 2008
JM3 Vol. 7 Issue 03
KEYWORDS: Gold, Reflectivity, Molybdenum, Ions, Extreme ultraviolet, Mirrors, Plasma, Xenon, Extreme ultraviolet lithography, Photodiodes

SPIE Journal Paper | 1 April 2007
JM3 Vol. 6 Issue 02
KEYWORDS: Plasma, Lithium, Mirrors, EUV optics, Extreme ultraviolet, Extreme ultraviolet lithography, Ions, Sputter deposition, Reflectivity, Optics manufacturing

Proceedings Article | 21 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Gold, Mirrors, Sputter deposition, Ions, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Molybdenum, Ruthenium, Plasma

Proceedings Article | 18 January 2007
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Gold, Mirrors, Contamination, Sputter deposition, Ions, Silicon, Extreme ultraviolet lithography, Molybdenum, Ruthenium, Tin

Proceedings Article | 18 January 2007
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Mirrors, Lithium, Sputter deposition, Ions, Surface roughness, Atomic force microscopy, Extreme ultraviolet, Optics manufacturing, EUV optics, Plasma

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top