Mr. Hubert Grange Profile

Hubert Grange

Engineer at CEA-LETI

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 23 January 2006 Paper

R. Rousier, C. Divoux, H. Grange, J. Charton, M. H. Vaudaine, L. Jocou, N. Raphoz, M. Trzmiel, C. Pisella, C. Chappaz

Proceedings Volume 6114, 61140K (2006) https://doi.org/10.1117/12.651659

KEYWORDS: Actuators, Mirrors, Silicon, Electrodes, Deformable mirrors, Dielectrics, Semiconducting wafers, Etching, Wavefronts, Optical lithography

Proceedings Article | 10 March 1999 Paper

Jean-Sebastian Danel, Michel Borel, Marie-Therese Delaye, Bernard Diem, Hubert Grange, France Michel, Patrice Rey, Sylvie Viollet-Bosson

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341238

KEYWORDS: Sensors, Semiconducting wafers, Silicon, Quartz, Etching, Photomasks, Electrodes, Capacitance, Temperature metrology, Packaging

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Keywords/Phrases