Mr. Hui-Chia Su
Student at National Tsing Hua Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 21, 2004
Proc. SPIE. 5392, Testing, Reliability, and Application of Micro- and Nano-Material Systems II
KEYWORDS: Scattering, X-rays, X-ray microscopy, Reflectivity, Surface roughness, Atomic force microscopy, Sapphire, Fractal analysis, Semiconducting wafers, X-ray characterization

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