Hui Wing Cheong
Senior Consultant at A*STAR - MEMS Dept
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 23 January 2006
Proc. SPIE. 6112, Microfluidics, BioMEMS, and Medical Microsystems IV
KEYWORDS: Gold, Sensors, Nanoparticles, Molecules, Coating, Reliability, Biosensors, Atomic force microscopy, Scanning electron microscopy, Signal detection

Proceedings Article | 23 January 2006
Proc. SPIE. 6112, Microfluidics, BioMEMS, and Medical Microsystems IV
KEYWORDS: Silica, Tissues, Sensors, Electrodes, Silicon, Microfabrication, Signal detection, Drug discovery, Industrial chemicals, Neurotransmitters

Proceedings Article | 2 April 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Microelectromechanical systems, Safety, Etching, Silicon, Silicon films, NOx, Chemical reactions, Semiconducting wafers, Chemical engineering, Isotropic etching

Proceedings Article | 2 April 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Oxides, Silica, Etching, Silicon, Hydrogen, Silicon films, Boron, Plasma etching, Semiconducting wafers, Oxidation

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