Dr. Hui Ju
Researcher at Nagoya Univ
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 4 January 2008
Proc. SPIE. 6831, Nanophotonics, Nanostructure, and Nanometrology II
KEYWORDS: Etching, Chemical species, Silicon, Atomic force microscopy, Oxygen, Scanning electron microscopy, Plasma etching, Microwave radiation, Fluorine, Plasma

Proceedings Article | 7 March 2007
Proc. SPIE. 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
KEYWORDS: Optical lithography, Polymethylmethacrylate, Resonators, Reflection, Etching, Crystals, Silicon, Semiconducting wafers, Micro optical resonators, Anisotropic etching

Proceedings Article | 6 December 2005
Proc. SPIE. 6050, Optomechatronic Micro/Nano Devices and Components
KEYWORDS: Mirrors, Fabry–Perot interferometers, Ferroelectric materials, Fabry–Perot interferometry, Interferometers, Quartz, Sputter deposition, Dielectrics, Reflectivity, Scanning electron microscopy

SPIE Journal Paper | 1 January 2005
JM3 Vol. 4 Issue 01
KEYWORDS: Silicon, Semiconducting wafers, Diffraction gratings, Crystals, Scanning electron microscopy, Wet etching, Atomic force microscopy, Wafer-level optics, Optical design, Photomasks

Proceedings Article | 28 September 2001
Proc. SPIE. 4557, Micromachining and Microfabrication Process Technology VII
KEYWORDS: Thermography, Modulation, Sensors, Silicon, Diffusion, Argon ion lasers, Reflectivity, Semiconductor lasers, Acoustics, Liquids

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