Proceedings Article | 4 November 2004
Proc. SPIE. 5543, Infrared Spaceborne Remote Sensing XII
KEYWORDS: Wafer-level optics, Photodetectors, Light emitting diodes, Quantum efficiency, Doping, Imaging devices, CCD cameras, Aluminum, Semiconducting wafers, Internal quantum efficiency
Imaging devices working in the near infrared (NIR), especially in the so-called eye-safe range, i.e., around 1.5 mm, have become increasingly important in many military and commercial applications; these include night vision, covert surveillance, range finding and semiconductor wafer inspection. We proposed a new approach in which a wafer-fused optical up-converter, combined with a commercially available charged coupled device (CCD), functions as an infrared camera. The optical up-converter converts incoming infrared light into shorter wavelength radiation that can be efficiently detected by the silicon CCD (cutoff wavelength about 1 mm). An optical up-converter with high efficiency at room-temperature is critical for low cost and large-area infrared imaging applications. A prototype 1.5 mm optical up-converter based on wafer fusion technology has been successfully fabricated. The device consists of an InGaAs/InP pin photodetector and a GaAs/AlGaAs light emitting diode. Experimental results show that the end-to-end up-conversion efficiency is 0.0177 W/W at room-temperature, corresponding to an internal quantum up-conversion efficiency of 76%. In this paper, the design, fabrications and characterization of the optical up-conversion devices is presented. Issues related to device optimization, such as improving internal and external up-conversion efficiency, are addressed. Preliminary results demonstrate the room-temperature up-conversion imaging operation of a pixelated wafer-fused device.
