Hui Wang
at Anchor Semiconductor Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11614, Design-Process-Technology Co-optimization XV
KEYWORDS: Wafer-level optics, Defect detection, Databases, Image processing, Scanning electron microscopy, Wafer inspection, Machine learning, Semiconductor manufacturing, Optical proximity correction, Semiconducting wafers

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Semiconductors, Lithography, Monochromatic aberrations, Optical lithography, Image processing, Image resolution, Scanning electron microscopy, Computational lithography, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 20 March 2019 Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Optical lithography, Defect detection, Etching, Image processing, Scanning electron microscopy, Process control, Wafer inspection, Semiconducting wafers, Process engineering, Chemical mechanical planarization

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