Dr. Huikan Liu
at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 12, 2013
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Diffraction, Data modeling, Calibration, Metals, Error analysis, 3D modeling, Photomasks, Optical proximity correction, Critical dimension metrology, Performance modeling

PROCEEDINGS ARTICLE | April 12, 2013
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Photovoltaics, Data modeling, Image processing, Printing, Photomasks, Source mask optimization, SRAF, Nanoimprint lithography, Binary data, Phase shifts

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