Prof. Huimin Xie
Professor at Tsinghua Univ
SPIE Involvement:
Conference Program Committee | Conference Chair | Author | Editor
Publications (18)

PROCEEDINGS ARTICLE | June 13, 2017
Proc. SPIE. 10449, Fifth International Conference on Optical and Photonics Engineering
KEYWORDS: Inspection, Reflectivity, Nondestructive evaluation, 3D printing, Additive manufacturing, Printing, Turbulence, Optical resolution, Spatial resolution, 3D scanning

SPIE Journal Paper | May 17, 2017
OE Vol. 56 Issue 05
KEYWORDS: Thin films, Fabrication, Ion beams, Etching, Scanning electron microscopy, Microscopes

PROCEEDINGS ARTICLE | June 22, 2015
Proc. SPIE. 9525, Optical Measurement Systems for Industrial Inspection IX
KEYWORDS: Thin films, Fringe analysis, Phase shifting, Reflection, Error analysis, Ions, Reflectivity, Interferometry, Numerical analysis, Mechanical sensors

SPIE Journal Paper | April 9, 2015
OE Vol. 54 Issue 04
KEYWORDS: Scanning electron microscopy, Raster graphics, Fringe analysis, Calibration, Microscopes, Optical engineering, Superposition, Fourier transforms, Silicon, Image processing

PROCEEDINGS ARTICLE | November 13, 2014
Proc. SPIE. 9276, Optical Metrology and Inspection for Industrial Applications III
KEYWORDS: Fabrication, Lithography, Microscopes, Electron beam lithography, Electron beams, Holography, Optical lithography, Metals, Deflectometry, Nanoimprint lithography

SPIE Journal Paper | November 18, 2013
OE Vol. 52 Issue 11
KEYWORDS: Calibration, Microscopes, Fourier transforms, Scanning electron microscopy, Image processing, Optical engineering, Mechanics, Electron microscopes, Optical microscopes, Chemical species

Showing 5 of 18 publications
Conference Committee Involvement (5)
Optical Micro- and Nanometrology
5 April 2016 | Brussels, Belgium
Optical Micro- and Nanometrology
13 April 2010 | Brussels, Belgium
International Conference on Experimental Mechanics 2008 and Seventh Asian Conference on Experimental Mechanics
8 November 2008 | Nanjing, China
Optical Micro- and Nanometrology in Microsystems Technology
8 April 2008 | Strasbourg, France
Optical Micro- and Nanometrology in Microsystems Technology
5 April 2006 | Strasbourg, France
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