Embedded defect types continue to be a challenge for scanning electron microscopes (SEM) review solutions. Though
high energy beams can be used to image these defect types, they cause damage to the reviewed sites. Also, imaging all
review sites at higher electron energy has often resulted in low topography surface defects to be non-visible due to high
penetration depth. In this work we present a method in which defects are reviewed at non-destructive lower electron
energies and only the non-visual review sites are reviewed at higher electron energies to image any potential additional
defect types. The non-visual defects are identified inline during review using automatic defect classification attributes.