Huiyan Pan
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 13 November 2007
Proc. SPIE. 6423, International Conference on Smart Materials and Nanotechnology in Engineering
KEYWORDS: Sensors, Silicon, Resistance, Doping, Electron microscopes, Scanning electron microscopy, Transmission electron microscopy, Silicon films, Low pressure chemical vapor deposition, Temperature metrology

Proceedings Article | 21 April 2006
Proc. SPIE. 6186, MEMS, MOEMS, and Micromachining II
KEYWORDS: Microelectromechanical systems, Actuators, Data modeling, Sensors, Crystals, Silicon, Resistance, Doping, Scanning electron microscopy, Silicon films

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