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Hung-Chih Chen
at Taiwan Semiconductor Manufacturing Co Ltd
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Author
Publications (3)
Proceedings Article | 16 October 2001 Paper
Parameter evaluation of photoresist coating model by using orthogonal experiment and regression analysis
Ren-Jyh Leu, Yu-Pen Fun, Hung-Chih Chen, Kun-I Lee, Hsiang-Chung Liu
Proceedings Volume 4602, (2001) https://doi.org/10.1117/12.445735
Proceedings Article | 1 October 1999 Paper
Local defect real-time monitor system in lithography
Hung-Chih Chen, Tse-Yu Lin, Yao-Chang Chu, Chih-Chien Hung
Proceedings Volume 3892, (1999) https://doi.org/10.1117/12.364496
KEYWORDS: Semiconducting wafers, Lithography, Inspection, Statistical analysis, Tolerancing, Particles, Contamination, Sensors, Industrial chemicals, Semiconductor manufacturing
Proceedings Article | 3 September 1998 Paper
Polyimide defect reduction
Shih-Shiung Chen, Hung-Chih Chen, Chen-Cheng Kuoe
Proceedings Volume 3507, (1998) https://doi.org/10.1117/12.324355
KEYWORDS: Silicon, Humidity, Coating, Semiconducting wafers, Particles, Photomasks, Chemical analysis, Polymers, Chemical reactions, Visualization
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