We have successfully fabricated organic thin-film transistors (OTFTs) on plastic substrates by the printing process. The
semiconductor of the OTFT was defined by inkjet printing. The poor consistency of the printing patterns has made high
uniformity of the OTFTs more difficult to achieve. Thus, a basic unit of circuits called a transistor array with redundant
transistors was designed and fabricated. In addition, we proposed a method to increase the circuit yield by incorporating
a pre-testing step during circuit fabrication. These devices were then connected via printed nano-silver to each other to
form a subcircuit called a gate. To verify the design flow, we measured the bootstrap inverters based on the transistor
arrays. A ring oscillator was fabricated in a similar methodology based on the gate array.
A great deal of progress has been made in the design of dual damascene process, including via first, trench first, and self-aligned. For overlay, via-first process provides the largest process tolerance to misalignment. However, the positive tone resist face to some difficulties in dual damascene via first approach of photo process, because the 0.18micrometers positive tone trench resist can not be exposed and removed in the 0.20micrometers via hole, observed residues from the SEM cross section profiles after development. In contrast, the negative tone resist show s great advantage in the via first process and producing desired patterns without resist residues in the via hole. In this paper, the design of dual damascene photo process using commercial N702Y (JSR) negative tone resist on DUV43 (Brewer Sc.) Bottom anti reflective coating is evaluated. To improve the depth of focus (DOF) of negative tone resist process, the different resolution enhancement techniques (RET) are investigated fro dense and isolated trench patterns: off-axis illumination (annular ½), attenuated phase shift mask (halftone 6%) with 248nm (NA 0.55) exposure technology, and experimental results regarding to its process performance are presented.