Hung-Eil Kim
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Reticles, Optical lithography, Metals, Transition metals, Electroluminescence, Printing, Finite element methods, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

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