Hung-Ming Lin
Deputy Director at Powerchip Semiconductor Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 11 April 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Lithography, Scanners, Particles, Coating, Photoresist materials, Line width roughness, Immersion lithography, Critical dimension metrology, Semiconducting wafers, Defect inspection

Proceedings Article | 24 March 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Semiconductors, Metrology, Data modeling, Scanners, Manufacturing, Control systems, Process control, Optical alignment, Semiconducting wafers, Overlay metrology

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