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Hussein Ali
at Siemens EDA
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 24 March 2017 Presentation + Paper
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis
Ayman Hamouda, Mohamed Bahnas, Dan Schumacher, Ioana Graur, Ao Chen, Kareem Madkour, Hussein Ali, Jason Meiring, Neal Lafferty, Chris McGinty
Proceedings Volume 10147, 101470R (2017) https://doi.org/10.1117/12.2260769
KEYWORDS: Optical proximity correction, Optical lithography, Semiconductor manufacturing, Photomasks, Computational lithography, Databases, Resolution enhancement technologies, Visualization, Semiconducting wafers, Design for manufacturing, Cadmium
Proceedings Article | 16 March 2016 Paper
Design space exploration for early identification of yield limiting patterns
Helen Li, Elain Zou, Robben Lee, Sid Hong, Square Liu, JinYan Wang, Chunshan Du, Recco Zhang, Kareem Madkour, Hussein Ali, Danny Hsu, Aliaa Kabeel, Wael ElManhawy, Joe Kwan
Proceedings Volume 9781, 97810W (2016) https://doi.org/10.1117/12.2218540
KEYWORDS: Monte Carlo methods, Optical lithography, Design for manufacturing, Lithography, Resolution enhancement technologies, Design for manufacturability, Manufacturing, Visualization, Legal, Double patterning technology, Acquisition tracking and pointing, Optical proximity correction, Roads
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