Prof. Hwai-Pwu Chou
at National Tsing Hua Univ
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 23 January 2006
Proc. SPIE. 6109, Micromachining and Microfabrication Process Technology XI
KEYWORDS: Microelectromechanical systems, Actuators, Oxides, Thin films, Mirrors, Metals, Silicon, Manufacturing, Micromirrors, Mirror structures

Proceedings Article | 17 September 2005
Proc. SPIE. 5922, Hard X-Ray and Gamma-Ray Detector Physics VII
KEYWORDS: Electronics, Digital signal processing, Imaging systems, Sensors, Spectroscopy, Scintillators, Imaging spectroscopy, CCD cameras, Medical imaging, Signal processing

Proceedings Article | 29 December 2003
Proc. SPIE. 5347, Micromachining Technology for Micro-Optics and Nano-Optics II
KEYWORDS: Optical fibers, Lithography, Microscopes, Microlens array, Ultraviolet radiation, Silicon, Photoresist materials, Microlens, Spherical lenses, Semiconducting wafers

Proceedings Article | 17 January 2003
Proc. SPIE. 4984, Micromachining Technology for Micro-Optics and Nano-Optics
KEYWORDS: Thin films, Switching, Etching, Magnetism, Laser ablation, Microactuators, Excimer lasers, Semiconducting wafers, Electromagnetism, Anisotropy

Proceedings Article | 8 May 2001
Proc. SPIE. 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001)
KEYWORDS: Optical fibers, Polymers, Silicon, Free space, Photoresist materials, Free space optics, Fiber couplers, Semiconducting wafers, Optics manufacturing, Wafer bonding

Proceedings Article | 30 April 2001
Proc. SPIE. 4407, MEMS Design, Fabrication, Characterization, and Packaging
KEYWORDS: Microelectromechanical systems, Packaging, Actuators, Microsystems, Sensors, Glasses, Silicon, Photoresist materials, Semiconducting wafers, Wafer bonding

Showing 5 of 7 publications
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