Dr. Hwan-Sung Cheon
at SAMSUNG SDI Co Ltd
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Carbon, Lithography, Etching, Polymers, Silicon, Coating, Resistance, Chemical vapor deposition, Silicon carbide, Semiconducting wafers

Proceedings Article | 4 December 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Carbon, Nanotechnology, Optical lithography, Etching, Silicon, Oxygen, Scanning electron microscopy, Photoresist materials, Photomasks, Plasma

Proceedings Article | 4 December 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Carbon, Lithography, Etching, Polymers, Silicon, Coating, Resistance, Polymerization, Plasma etching, Plasma

Proceedings Article | 26 March 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Carbon, Lithography, Etching, Chemical species, Dry etching, Polymers, Resistance, Chemical vapor deposition, Plasma etching, Plasma

Proceedings Article | 2 April 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Carbon, Lithography, Etching, Polymers, Particles, Silicon, Reflectivity, Photoresist processing, Semiconducting wafers, Plasma

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