Prof. Hye-Keun Oh
Professor of Applied Physics at Hanyang Univ
SPIE Involvement:
Publications (126)

Proceedings Article | 10 April 2024 Poster + Paper
Haneul Kim, Jungyeon Kim, Young-Woo Kang, Min-woo Kim, Tae Joong Ha, Gi Sung Lee, Hye-Keun Oh, Jinho Ahn
Proceedings Volume 12953, 129531B (2024)
KEYWORDS: Pellicles, Porosity, Transmittance, Extreme ultraviolet, Simulations, Film thickness, Lithography, Extreme ultraviolet lithography, Finite element methods, Critical dimension metrology

Proceedings Article | 21 November 2023 Poster + Paper
Proceedings Volume 12750, 1275013 (2023)
KEYWORDS: Pellicles, Scanners, Extreme ultraviolet, Particles, Finite element methods, Extreme ultraviolet lithography, Yield improvement, Transmittance, Thermal stability, Thermal deformation

Proceedings Article | 21 November 2023 Poster + Paper
Proceedings Volume 12750, 1275016 (2023)
KEYWORDS: Thermal deformation, Semiconducting wafers, Extreme ultraviolet lithography, Materials properties, Scanners, Optical lithography, Finite element methods, Extreme ultraviolet, Convection, Overlay metrology

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12494, 124940G (2023)
KEYWORDS: Pellicles, Particles, Extreme ultraviolet, Extreme ultraviolet lithography, Temperature metrology, Semiconducting wafers, Tin, Aluminum, Scanners, Materials properties, High volume manufacturing

Proceedings Article | 1 December 2022 Poster + Paper
Proceedings Volume 12292, 122920S (2022)
KEYWORDS: Pellicles, Particles, Extreme ultraviolet, Graphene, Silicon carbide, Transmittance, Extreme ultraviolet lithography, Photomasks, Image processing, Semiconducting wafers

Showing 5 of 126 publications
Conference Committee Involvement (3)
SPIE Lithography Asia - Korea
13 October 2010 | n/a, Republic of Korea
SPIE Lithography Asia - Taiwan
18 November 2009 | Taipei, Taiwan
SPIE Lithography Asia - Taiwan
4 November 2008 | Taipei, Taiwan
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