Prof. Hye-Keun Oh
at Hanyang Univ
SPIE Involvement:
Conference Program Committee | Author
Publications (110)

PROCEEDINGS ARTICLE | November 7, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Hydrogen, Pellicles, Finite element methods, Extreme ultraviolet, Extreme ultraviolet lithography

PROCEEDINGS ARTICLE | October 11, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Wafer-level optics, Lithography, Optical lithography, Reflectivity, Finite element methods, Infrared radiation, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, EUV optics

PROCEEDINGS ARTICLE | October 9, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Lithography, Optical lithography, Contamination, Particles, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology, Applied physics

PROCEEDINGS ARTICLE | March 22, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Multilayers, Image processing, Nickel, Computer simulations, Finite element methods, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Tantalum, Semiconducting wafers

SPIE Journal Paper | December 29, 2017
JM3 Vol. 16 Issue 04
KEYWORDS: Pellicles, Extreme ultraviolet, Coating, Ruthenium, Silicon, Extreme ultraviolet lithography, Absorption, Photomasks, Finite element methods, Multilayers

PROCEEDINGS ARTICLE | October 26, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Graphene, Pellicles, Finite element methods, Extreme ultraviolet, Extreme ultraviolet lithography, Silicon carbide

Showing 5 of 110 publications
Conference Committee Involvement (3)
SPIE Lithography Asia - Korea
13 October 2010 | n/a, Republic of Korea
SPIE Lithography Asia - Taiwan
18 November 2009 | Taipei, Taiwan
SPIE Lithography Asia - Taiwan
4 November 2008 | Taipei, Taiwan
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