Prof. Hye-Keun Oh
Professor of Applied Physics at Hanyang Univ
SPIE Involvement:
Author
Publications (112)

Proceedings Article | 26 September 2019
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Semiconductors, Cooling systems, Mirrors, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, Semiconducting wafers, Overlay metrology

Proceedings Article | 26 September 2019
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Lithography, Optical lithography, Graphene, Particles, Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, Silicon carbide, Ruthenium

Proceedings Article | 7 November 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Hydrogen, Pellicles, Finite element methods, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 11 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Wafer-level optics, Lithography, Optical lithography, Reflectivity, Finite element methods, Infrared radiation, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, EUV optics

Proceedings Article | 9 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Lithography, Optical lithography, Contamination, Particles, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology, Applied physics

Showing 5 of 112 publications
Conference Committee Involvement (3)
SPIE Lithography Asia - Korea
13 October 2010 | n/a, Republic of Korea
SPIE Lithography Asia - Taiwan
18 November 2009 | Taipei, Taiwan
SPIE Lithography Asia - Taiwan
4 November 2008 | Taipei, Taiwan
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