Ms. Hye-Kyoung Lee Profile

Hye-Kyoung Lee

at Samsung Electronics Co Ltd

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Publications (1)

Proceedings Article | 20 October 2006 Paper

The study of optical performance for quartz dry etching quality in ArF lithography

Won-Suk Ahn, Hye-Kyung Lee, Young-Ju Park, Hyuk-Joo Kwon, Seong-Woon Choi, Woo-Sung Han

Proceedings Volume 6349, 63490C (2006) https://doi.org/10.1117/12.686839

KEYWORDS: Quartz, Etching, Photomasks, Chromium, Dry etching, Nanoimprint lithography, Resolution enhancement technologies, Critical dimension metrology, Electroluminescence, Lithography

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