PROCEEDINGS ARTICLE | February 14, 2007
Proc. SPIE. 6443, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XIV
KEYWORDS: Microelectromechanical systems, Confocal microscopy, Endoscopy, Microscopes, Mirrors, Tissues, Scanners, Collimation, In vivo imaging, Natural surfaces
Here we describe a simple optical design for a MEMS-based dual-axes fiber optic confocal scanning microscope that has
been miniaturized for handheld imaging of tissues, and which is capable of being further scaled to smaller dimensions
for endoscope compatibility while preserving its field-of-view (FOV), working distance, and resolution. Based on the
principle of parallel beams that are focused by a single parabolic mirror to a common point, the design allows the use of
replicated optical components mounted and aligned within a rugged cylindrical housing that is designed for use as a
handheld tissue microscope. A MEMS scanner is used for high speed scanning in the X-Y plane below the tissue
surface. An additional design feature is a mechanism for controlling a variable working distance, thus producing a scan
in the Z direction and allowing capture of 3-D volumetric images of tissue. The design parameters that affect the
resolution, FOV, and working distance are analyzed using ASAPTM optical modeling software and verified by
experimental results. Other features of this design include use of a solid immersion lens (SIL), which enhances both
resolution and FOV, and also provides index matching between the optics and the tissue.
