CONFERENCE PROCEEDINGS
Advanced Search
Hyo-Jin Ahn
at Photronics Inc
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 16 September 2013 Paper
Mask contamination study in electron and ion beam repair system
Hyo-Jin Ahn, Jong-Min Kim, Dong-Seok Lee, Gyu-Yong Lee, Dong-Heok Lee, Sang-Soo Choi
Proceedings Volume 8880, 88801T (2013) https://doi.org/10.1117/12.2026123
KEYWORDS: Reflectivity, Contamination, Inspection, Ions, Ion beams, Reflection, Chromium, Silicon, Mask making, Microscopes
Proceedings Article | 25 September 2010 Paper
Advanced photomask cleaning for 32nm and beyond
Jong-Min Kim, Young-Jin An, Dong-Seok Lee, Hyo-Jin Ahn, Hyun-Ju Jung, Jae-Chul Lee, Dong-Heok Lee, Sang-Soo Choi
Proceedings Volume 7823, 78232X (2010) https://doi.org/10.1117/12.864532
KEYWORDS: Air contamination, Acoustics, Inspection, Scattering, Mask cleaning, Photomasks, SRAF, Critical dimension metrology, Particles, Scanning electron microscopy
Proceedings Article | 30 May 1995 Paper
Development and applications of high-speed single-frame camera with high repetition rate
Hyo-Jin Ahn, Seok Ryu, D.-H. Cho, Nae-Kak Chang, Jae-Sun Lee, Gi-Jung Nam, Seung-Han Park, Ung Kim
Proceedings Volume 2513, (1995) https://doi.org/10.1117/12.209594
KEYWORDS: Cameras, Microchannel plates, High speed cameras, Velocity measurements, Spatial resolution, Objectives, Luminescence, Design for manufacturability, Manufacturing, Relays
Proceedings Article | 30 May 1995 Paper
Image converter streak camera development and applications in Korea
Hyo-Jin Ahn, D.-H. Cho, Nae-Kak Chang, Jae-Sun Lee, Gi-Jung Nam, Seung-Han Park, Ung Kim, A. Smirnova, Valerij Lozovoi, Mikhail Schelev, Alexander Prokhorov
Proceedings Volume 2513, (1995) https://doi.org/10.1117/12.209593
KEYWORDS: Streak cameras, Picosecond phenomena, Luminescence, Electrodes, Microchannel plates, Time metrology, Gemini Planet Imager, Physics, Prototyping, Camera shutters
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top