Ms. Hyo Jung Roh Profile

Hyo Jung Roh

at Dongjin Semichem Co Ltd

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Author

Publications (2)

Proceedings Article | 16 April 2011 Paper

Study of major factors to affect photoresist profile on developable bottom anti-reflective coating process

Hyo Jung Roh, Dong Kyu Ju, Hyun Jin Kim, Jaehyun Kim

Proceedings Volume 7972, 79721Q (2011) https://doi.org/10.1117/12.879581

KEYWORDS: Photoresist materials, Polymers, Photoresist developing, Critical dimension metrology, Bottom antireflective coatings, Lithography, Reflectivity, Double patterning technology, Etching, Temperature metrology

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Proceedings Article | 26 March 2008 Paper

Development of new BARC for immersion process using hyper NA

Hyo Jung Roh, Man Ho Han, Sang Jeoung Kim, Hyun Jin Kim, Jaehyun Kim, Keun Kyu Kong, Ki Lyoung Lee, Sung Koo Lee, Dong Heok Park

Proceedings Volume 6923, 69232T (2008) https://doi.org/10.1117/12.776801

KEYWORDS: Reflectivity, Etching, Refractive index, Semiconductors, Photoresist processing, Polymers, Lithography, Photorefractive polymers, Photoresist materials, Materials processing

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