Hyoung-Sub Shim
at Korea Institute of Industrial Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 December 2005
Proc. SPIE. 6048, Optomechatronic Actuators and Manipulation
KEYWORDS: Head, Scanning electron microscopy, Semiconducting wafers, Wafer bonding, Manufacturing, Temperature metrology, Packaging, Optics manufacturing, Information technology, Manufacturing equipment

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