Ms. Hyun-Ju Lee Profile

Hyun-Ju Lee

at Hanyang Univ

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 4 October 2016 Paper

Hyun-Ju Lee, Eun-Sang Park, In-Seon Kim, Hye-Keun Oh

Proc. SPIE. 9985, Photomask Technology 2016

KEYWORDS: Graphene, Scanners, Silicon, Pellicles, Finite element methods, Extreme ultraviolet, Silicon carbide, Molybdenum, Zirconium, Protactinium

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Keywords/Phrases