Hyun-Ju Lee
at Hanyang Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 4 October 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Graphene, Scanners, Silicon, Pellicles, Finite element methods, Extreme ultraviolet, Silicon carbide, Molybdenum, Zirconium, Protactinium

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