Dr. Hyun-Mi Kim
at Seoul National Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 26, 2009
Proc. SPIE. 7222, Quantum Sensing and Nanophotonic Devices VI
KEYWORDS: Lithography, Nanostructures, Electron beam lithography, Denoising, Crystals, Silicon, Image resolution, Transmission electron microscopy, Objectives, Photomasks

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