Dr. Hyun Soon Lim
at Korea Kumho Petrochemical Co Ltd
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 17 April 2014 Paper
Joonhee Han, Hyun Soon Lim, Jin Ho Kim, Sumi Choi, Jin Bong Shin, Chang Wan Bae, In Young Yoo, Bong Ha Shin, Eun Kyo Lee, Hyun Sang Joo, Dong Chul Seo, Jun Sung Chun
Proceedings Volume 9048, 90482R (2014) https://doi.org/10.1117/12.2046573
KEYWORDS: Polymers, Extreme ultraviolet, Lithography, Polymer thin films, Electroluminescence, Extreme ultraviolet lithography, Palladium, Line width roughness, Diffusion, Scanning electron microscopy

Proceedings Article | 1 April 2013 Paper
Hyun Sang Joo, Jin Ho Kim, Joon Hee Han, Chang Wan Bae, Jin Bong Shin, Hyun Soon Lim, Seung Duk Cho, Sam Min Kim
Proceedings Volume 8679, 86792Z (2013) https://doi.org/10.1117/12.2010861
KEYWORDS: Polymers, Extreme ultraviolet, Diffusion, Amplifiers, Line width roughness, Extreme ultraviolet lithography, Semiconducting wafers, Chemical species, Yield improvement, Sodium

Proceedings Article | 23 March 2012 Paper
Joonhee Han, Jin Bong Shin, Yong Hwa Hong, So Jung Park, Hyun Soon Lim, Hyun Sang Joo, Sam Min Kim, Dong Chul Seo
Proceedings Volume 8322, 83222B (2012) https://doi.org/10.1117/12.916025
KEYWORDS: Line width roughness, Polymers, Extreme ultraviolet lithography, Extreme ultraviolet, Diffusion, Electron beam lithography, Lithography, Light sources, Semiconducting wafers, Oxygen

Proceedings Article | 8 April 2011 Paper
Jin Bong Shin, Hyun Sang Joo, Seung Duk Cho, Hyun Soon Lim, Jin Ho Kim, Seung Jae Lee, Dae Hyeon Shin, JoonHee Han, Dong Chul Seo
Proceedings Volume 7969, 79692N (2011) https://doi.org/10.1117/12.870702
KEYWORDS: Diffusion, Polymers, Line edge roughness, Extreme ultraviolet, Photoresist materials, Semiconducting wafers, Edge roughness, Extreme ultraviolet lithography, Lithography, Silicon

Proceedings Article | 4 December 2008 Paper
Hyun Soon Lim, Dong Chul Seo, Chang Soo Lee, Sang Wok Park, Sang Jin Kim, Dae Hyeon Shin, Jin Bong Shin, Joo Hyun Park
Proceedings Volume 7140, 71403X (2008) https://doi.org/10.1117/12.804642
KEYWORDS: Polymers, Etching, Photoresist materials, Resistance, Transmittance, Monochromatic aberrations, Lithography, Polymerization, Line width roughness, Glasses

Showing 5 of 6 publications
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