Dr. Hyunwoo Hwang
Senior Engineer at SAMSUNG ELECTRONICS CO.,LTD
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 24 March 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Reticles, Scanners, Distortion, HVAC controls, Optical alignment, Control systems, Thermal effects, Temperature metrology, Semiconducting wafers, Overlay metrology, Calibration

Proceedings Article | 24 March 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Semiconducting wafers, Sensors, Time metrology, Scanners, Optical alignment, Calibration, Wafer testing, Overlay metrology, Metrology, Computer programming

Proceedings Article | 15 March 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Optical alignment, Signal processing, Overlay metrology, Optical lithography, Optics manufacturing, Opacity, Materials processing, Sensors, Wafer testing, Near infrared, Image processing

Proceedings Article | 26 March 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Semiconducting wafers, Logic, Reticles, Overlay metrology, Control systems, Statistical analysis, Process control, Electronics, Optical alignment, Optical lithography

Proceedings Article | 6 April 2009
Proc. SPIE. 7287, Electroactive Polymer Actuators and Devices (EAPAD) 2009
KEYWORDS: Plasma etching, Plasma, Platinum, Resistance, Actuators, Capacitance, Polymers, Composites, Process modeling, Optical lithography

Showing 5 of 8 publications
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