Dr. Hyun Wook Ro
at National Institute of Standards and Technology
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 18 March 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Ellipsometry, Data modeling, Polymers, Annealing, In situ metrology, Atomic force microscopy, Scatterometry, Solids, Nanoimprint lithography, Statistical modeling

Proceedings Article | 28 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Electron beam lithography, Optical lithography, Scattering, Skin, X-rays, Dielectrics, Silicon, Reflectivity, Picosecond phenomena, Nanoimprint lithography

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Lithography, Metrology, Data modeling, Scattering, X-rays, X-ray sources, Silicon, Laser scattering, Reflectivity, Nanoimprint lithography

Proceedings Article | 15 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Semiconductors, Thin films, Lithography, Electron beam lithography, Optical lithography, X-rays, Dielectrics, Silicon, Reflectivity, Nanoimprint lithography

Proceedings Article | 23 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Oxides, Nanostructures, Data modeling, Scattering, X-rays, Silicon, Reflectivity, Nanoimprint lithography, Reactive ion etching, Semiconducting wafers

Showing 5 of 7 publications
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