Small particles are one of the biggest sources that cause loss in semiconductor and flat panel display industry. Therefore, it is important to control them during their manufacturing process. To achieve this goal, exact measurement of particles is first required. Laser light scattering is the most widely used technique for diagnosis of particles because it does not disturb flow field and enables real time and spatially resolved analysis. Measurement of nonspherical aggregates comprised of small primary particles is difficult compared with spherical particles because they have very complex morphology. In addition, most researches on aggregates using light scattering are limited to point measurement, which requires much time to inspect large area and is difficult to observe unsteady phenomenon. Motivated by this, we have developed a laser light scattering method for simultaneous measurement of spatial distributions of aggregate size and morphology.
Silica aggregates that were generated in Methane/air premixed flame were used as test particles. Multiangular planar light scattering measurement was carried out using a sheet beam of Ar ion laser and an intensified charge coupled device (ICCD) camera as a light source and a detector, respectively. The result was interpreted based on the Rayleigh-Debye-Gans scattering theory for fractal aggregates to obtain the mean radius of gyration and fractal dimension that are the parameters characterizing aggregate size and morphology. The suitability of our new technique was confirmed by experiment using conventional light scattering.