Hyung-Do Kim
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Publications (6)

Proceedings Article | 4 December 2008 Paper
Chang-Min Park, Hyun-Byuk Kim, Hyung-Do Kim, Hyun-Woo Kim, Cheol-Hong Kim, Joo-On Park, Doohoon Goo, Jeongho Yeo, Seong-Woon Choi, Woo-Sung Han, Min-Su Choi, Sung-Woo Hwang
Proceedings Volume 7140, 714024 (2008) https://doi.org/10.1117/12.804627
KEYWORDS: Critical dimension metrology, Semiconducting wafers, Photomasks, Double patterning technology, Lithography, Etching, Semiconductors, Control systems, Spatial resolution, Transistors

Proceedings Article | 14 May 2004 Paper
Si-Hyun Kim, Hyung-Do Kim, Si-Hyeung Lee, Chang-Min Park, Man-Hyoung Ryoo, Gi-Sung Yeo, Jung-Hyeon Lee, Han-Ku Cho, Woo-Sung Han, Joo-Tae Moon
Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.536340
KEYWORDS: Photoresist processing, Optical lithography, Resolution enhancement technologies, Lithography, Semiconducting wafers, Etching, Optical proximity correction, Chemical reactions, Critical dimension metrology, Materials processing

Proceedings Article | 28 August 2003 Paper
Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504280
KEYWORDS: Photomasks, Nanoimprint lithography, Logic, Phase shifts, Lithography, Manufacturing, Scanners, Semiconducting wafers, Logic devices, Scanning electron microscopy

Proceedings Article | 12 June 2003 Paper
Hyung-Do Kim, Si-Hyeung Lee, Sang-Jun Choi, Jung-Hyeon Lee, Han-Ku Cho, Woo-Sung Han, Joo-Tae Moon
Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485120
KEYWORDS: Coating, Polymers, Line edge roughness, Etching, Scanning electron microscopy, Lithography, Photoresist processing, Reliability, Resistance, Electron beams

Proceedings Article | 30 July 2002 Paper
Insung Kim, Sung-gon Jung, Hyung-Do Kim, Gisung Yeo, In-Gyun Shin, Junghyun Lee, Hanku Cho, Joo-Tae Moon
Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474595
KEYWORDS: Transmittance, Lithography, Photomasks, Nanoimprint lithography, Electroluminescence, Scanners, Image transmission, Optical lithography, Image quality, Roads

Showing 5 of 6 publications
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