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Hyung-Sub Son
at ASML Korea Co Ltd
SPIE Involvement:
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Publications (1)
Proceedings Article | 26 March 2019 Paper
YieldStar uDBO overlay metrology in Samsung D1y DRAM volume production
Jang-Sun Kim, Jin-Moo Byun, Remco Lancee, Jong-Hyun Hwang, Hyeon-Jun Ha, Kwang-Young Hu, Se-Ra Jeon, Won-Jae Jang, Hyung-Sub Son, Vidar van der Meijden, Marc Noot, Bartosz Foltynski, Lukasz Macht, Grzegorz Grzela, Cedric Grouwstra
Proceedings Volume 10959, 109592M (2019) https://doi.org/10.1117/12.2514931
KEYWORDS: Overlay metrology, Metrology, Front end of line, Yield improvement, Control systems, Scatterometry
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