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Hyungu Kim
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 20 August 2020 Poster + Paper
Signal-to-noise ratio evaluation for the nanometer-scale patterned defect inspection using dark-field microscopy with tailored polarization illumination
Proceedings Volume 11485, 114850N (2020) https://doi.org/10.1117/12.2567116
KEYWORDS: Signal to noise ratio, Polarization, Scattering, Near field, Cameras, Semiconducting wafers, Ellipsometry
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