Dr. I-Lun Tseng
MTS Design Enablement at GLOBALFOUNDRIES Singapore Pte Ltd
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Semiconductors, Lithography, Mirrors, Lithium, Manufacturing, Printing, Photomasks, Transistors, Double patterning technology, Analog electronics

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Lithography, Manufacturing, Integrated circuits, Algorithm development, Integrated circuit design, Design for manufacturability

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