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I.C. Chou
at Taiwan Semiconductor Manufacturing Co Ltd
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Publications (1)
Proceedings Article | 1 December 2008 Paper
Advanced technology for after-develop inspection
Z. Y. Chen, I. C. Chou, J. H. Yang, Wallas Chen, Josh Chang, Henry Chen, Melvin Ng, Meng-Che Wu, Cathy Perry-Sullivan, Mingwei Li
Proceedings Volume 7140, 71400Y (2008) https://doi.org/10.1117/12.804661
KEYWORDS: Inspection, Wafer-level optics, Signal to noise ratio, Deep ultraviolet, Semiconducting wafers, Metals, Optics manufacturing, Defect inspection, Optical lithography, Optical inspection
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