Il-Yong Jang
Sr Member of Technical Staff at Toppan Photomask Inc
SPIE Involvement:
Publications (20)

Proceedings Article | 17 November 2016 Paper
Proceedings Volume 9985, 99851S (2016)
KEYWORDS: Photomasks, Etching, Plasma, Chromium, Argon, Dry etching, Chlorine, Emission spectroscopy, Critical dimension metrology, Plasma etching

SPIE Journal Paper | 15 May 2015 Open Access
JM3, Vol. 14, Issue 02, 023505, (May 2015)
KEYWORDS: Extreme ultraviolet, Photomasks, Multilayers, Chemical species, Inspection, Computer simulations, Interfaces, Transmission electron microscopy, Modeling and simulation, Waveguides

Proceedings Article | 16 March 2015 Paper
Proceedings Volume 9422, 94220Q (2015)
KEYWORDS: Photomasks, Extreme ultraviolet, Multilayers, Chemical species, Extreme ultraviolet lithography, Inspection, Monte Carlo methods, Computer simulations, Waveguides, Transmission electron microscopy

Proceedings Article | 28 July 2014 Paper
Proceedings Volume 9256, 92560I (2014)
KEYWORDS: Ruthenium, Silicon, Extreme ultraviolet, Finite element methods, Interfaces, Oxides, Oxygen, Neodymium, Photomasks, Oxidation

Proceedings Article | 17 April 2014 Paper
Suyoung Lee, Jungyoup Kim, Soo-Wan Koh, Ilyong Jang, Jaehyuck Choi, Hyungho Ko, Hwan-Seok Seo, Seong-Sue Kim, Byung Gook Kim, Chan-Uk Jeon
Proceedings Volume 9048, 90480J (2014)
KEYWORDS: Ruthenium, Ultraviolet radiation, Extreme ultraviolet, Extreme ultraviolet lithography, Transmission electron microscopy, Photomasks, Silica, Scanning electron microscopy, Annealing, Oxygen

Showing 5 of 20 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top