Dr. Ian M. McMackin
at Applied Materials
SPIE Involvement:
Author
Publications (17)

Proceedings Article | 7 March 2014
Proc. SPIE. 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
KEYWORDS: Lithography, Nanostructures, Antireflective coatings, Optical lithography, Glasses, Ultraviolet radiation, Reflectivity, Refraction, Photomasks, Cones

SPIE Journal Paper | 1 July 2010
JM3 Vol. 9 Issue 03

Proceedings Article | 18 March 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Lithography, Electron beam lithography, Defect detection, Metals, Inspection, Scanning electron microscopy, Wafer inspection, Photomasks, Semiconducting wafers, Defect inspection

Proceedings Article | 18 March 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Lithography, Contamination, Particles, Inspection, Scanning electron microscopy, Photomasks, Nanoimprint lithography, Photoresist processing, Semiconducting wafers, Mask cleaning

Proceedings Article | 17 October 2008
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Lithography, Etching, Metals, Image segmentation, Ultraviolet radiation, Inspection, Scanning electron microscopy, Photomasks, Semiconducting wafers, Defect inspection

Showing 5 of 17 publications
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