Dr. Ido Dolev
Physicist at Applied Materials Inc
SPIE Involvement:
Author
Publications (9)

SPIE Journal Paper | February 2, 2016
OE Vol. 55 Issue 02
KEYWORDS: Particles, Semiconductors, Finite-difference time-domain method, Scattering, Signal to noise ratio, Optical inspection, Silicon, Polarization, Light scattering, Optical transfer functions

PROCEEDINGS ARTICLE | June 28, 2013
Proc. SPIE. 8701, Photomask and Next-Generation Lithography Mask Technology XX
KEYWORDS: Wafer-level optics, Signal to noise ratio, Defect detection, Deep ultraviolet, Inspection, Optical inspection, Printing, Photomasks, Geometrical optics, Semiconducting wafers

PROCEEDINGS ARTICLE | April 20, 2011
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Polarization, Scattering, Light scattering, Inspection, Bridges, Extreme ultraviolet, Extreme ultraviolet lithography, Neodymium, Photoresist processing, Semiconducting wafers

PROCEEDINGS ARTICLE | April 20, 2011
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Lithography, Deep ultraviolet, Polarization, Scattering, Etching, Light scattering, Inspection, Bridges, Extreme ultraviolet, Semiconducting wafers

PROCEEDINGS ARTICLE | January 18, 2011
Proc. SPIE. 7747, 16th International School on Quantum Electronics: Laser Physics and Applications
KEYWORDS: Switches, Switching, Modulation, Polarization, Crystals, Fourier transforms, Photonic crystals, Nonlinear optics, Laser crystals, Nonlinear crystals

PROCEEDINGS ARTICLE | April 2, 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Lithography, Visible radiation, Deep ultraviolet, Polarization, Scattering, Ultraviolet radiation, Light scattering, Inspection, Bridges, Semiconducting wafers

Showing 5 of 9 publications
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