Prof. Idriss Blakey
Associate Professor at Univ of Queensland
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Publications (20)

PROCEEDINGS ARTICLE | March 27, 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Electron beam lithography, Refractive index, Polymers, Photoresist materials, Polymerization, Extreme ultraviolet, Absorbance, Extreme ultraviolet lithography, Semiconducting wafers, Polymer thin films

PROCEEDINGS ARTICLE | March 21, 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Oxides, Electron beam lithography, Optical lithography, Nanoparticles, Metals, Particles, Materials processing, Scanning electron microscopy, Transmission electron microscopy, Photoresist materials, Extreme ultraviolet lithography, Hafnium, Zirconium, Photoresist developing

SPIE Journal Paper | July 21, 2014
JM3 Vol. 13 Issue 03
KEYWORDS: Picosecond phenomena, Polymethylmethacrylate, Thin films, Liquids, Polymers, Scattering, Scanning electron microscopy, Laser scattering, Annealing, Directed self assembly

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Thin films, Scattering, Polymers, Annealing, X-rays, Scanning electron microscopy, Directed self assembly, Picosecond phenomena, Semiconducting wafers, Liquids

PROCEEDINGS ARTICLE | March 4, 2014
Proc. SPIE. 8939, Biomedical Vibrational Spectroscopy VI: Advances in Research and Industry
KEYWORDS: Gold, Tissues, Nanoparticles, Polymers, Surface enhanced Raman spectroscopy, Raman spectroscopy, Raman scattering, Tissue optics, Neptunium, Molecular assembly

PROCEEDINGS ARTICLE | March 26, 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Lithography, Electron beam lithography, Polymers, Annealing, Atomic force microscopy, Photoresist materials, Directed self assembly, Extreme ultraviolet lithography, Line edge roughness, Semiconducting wafers

Showing 5 of 20 publications
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